| The apparatus is used for the orientation and measurement of the end face of large-diameter silicon single-crystal wafer, as well as the single-crystal orientation and measurement of other kinds of materials.
DX-7 is used to measure the end face of silicon single crystal bar(ingot) whose diameter is 0.5~8inch and weight is 30kg. It can also be used to measure silicon crystal wafer which has been cut, equipped with aspirator pump as well. The measure crystal plane is 100, 110, 111, 210 and so on. The accuracy of the measurement is ± 30 ″and the least reading is 10 ″. The apparatus has two workplaces which can finish the same task at the same time, and it can also be used to measure the end face or wafer of crystal bar (ingot) of different diameters according to client's requirement.
It adopts DX-2 type orientation unit as the host machine and we can supply customers with other type of main machines (for example DX-4A: accuracy: ± 15 ″, least reading: 1 ″) if clients demand so. Clients requirements are also accepted to design various types of instruments for special purposes. |