Description
The unit is used to orient silicon cyrstal ingot and measure the OF-plane , it can also be used for other kinds of semiconductor single crystal ingots to measure the OF-plane .
The silicon ingot is set on this unit vertically to measure OF-plane under X-ray .
The specifications in below table
| Items |
Specifications |
| Ingot diameter |
2-8 inch |
| Ingot length |
500 |
| Crystal plane |
110 |
| Orient accuracy |
±30″ |
| Min . reading |
10″ |
